Atomic Layer Deposition for Semiconductors
This post was published 4 years ago. Download links are most likely obsolete. If that's the case, try asking the uploader to re-upload.
English | ISBN: 1461480531 | 2014 | 263 pages | EPUB, PDF | 5 MB + 8 MB
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Download from free file storage
Resolve the captcha to access the links!
Registered members don't get captcha ... just sayin